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Abstract Dry deposition could partially explain the observed response in ambient ozone to extreme hot and dry episodes. We examine the response of ozone deposition to heat and dry anomalies using three long‐term co‐located ecosystem‐scale carbon dioxide, water vapor and ozone flux measurement records. We find that, as expected, canopy stomatal conductance generally decreases during days with dry air or soil. However, during hot days, concurrent increases in non‐stomatal conductance are inferred at all three sites, which may be related to several temperature‐sensitive processes not represented in the current generation of big‐leaf models. This may offset the reduction in stomatal conductance, leading to smaller net reduction, or even net increase, in total deposition velocity. We find the response of deposition velocity to soil dryness may be related to its impact on photosynthetic activity, though considerable variability exists. Our findings emphasize the need for better understanding and representation of non‐stomatal ozone deposition.